Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530626 | Method and apparatus for ESC charge control for wafer clamping | Sonam D. Sherpa, Sergey Voronin, Alok Ranjan, Yoshio Ishikawa, Takashi Enomoto | 2016-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530626 | Method and apparatus for ESC charge control for wafer clamping | Sonam D. Sherpa, Sergey Voronin, Alok Ranjan, Yoshio Ishikawa, Takashi Enomoto | 2016-12-27 |