Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530626 | Method and apparatus for ESC charge control for wafer clamping | Jason Marion, Sonam D. Sherpa, Alok Ranjan, Yoshio Ishikawa, Takashi Enomoto | 2016-12-27 |
| 9512518 | Apparatus for treating a gas stream | Christopher J. Clements, John Leslie Bidder | 2016-12-06 |
| 9371581 | Apparatus for treating a gas stream | Christopher J. Clements, John Leslie Bidder, Daniel Martin McGrath | 2016-06-21 |
| 9346005 | Apparatus for treating a gas stream | John Leslie Bidder, Andrew Arthur Chambers | 2016-05-24 |
| 9277636 | Plasma torch | Christopher J. Clements, Daniel Martin McGrath, Fraser Gray, Andrew James Seeley | 2016-03-01 |