Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9378975 | Etching method to form spacers having multiple film layers | Alok Ranjan | 2016-06-28 |
| 9318343 | Method to improve etch selectivity during silicon nitride spacer etch | Alok Ranjan | 2016-04-19 |