Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9499396 | MEMS devices and methods of forming same | Kai-Chih Liang, Chia-Hua Chu, Jiou-Kang Lee, Chung-Hsien Lin | 2016-11-22 |
| 9466532 | Micro-electro mechanical system (MEMS) structures with through substrate vias and methods of forming the same | Chia-Hua Chu, Kuei-Sung Chang | 2016-10-11 |
| 9452924 | MEMS devices and fabrication methods thereof | Chia-Hua Chu, Chun-Wen Cheng, Chung-Hsien Lin | 2016-09-27 |
| 9450109 | MEMS devices and fabrication methods thereof | Chia-Hua Chu, Chun-Wen Cheng, Chung-Hsien Lin | 2016-09-20 |