Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9482658 | Test system and method for determining thermal effects of tissue ablation on an ex vivo tissue | Junghun Choi | 2016-11-01 |
| 9460997 | Interconnect structure for semiconductor devices | Han-Hsin Kuo, Chung-Chi Ko, Neng-Jye Yang, Fu-Ming Huang, Chi-Ming Tsai | 2016-10-04 |
| 9449841 | Methods and systems for chemical mechanical polish and clean | Shich-Chang Suen, Chi-Jen Liu, Ying-Liang Chuang, Li-Chieh Wu, Ming-Liang Yen | 2016-09-20 |
| 9352443 | Platen assembly, chemical-mechanical polisher, and method for polishing substrate | Shich-Chang Suen, Chin-Hsiang Chan, Yung-Cheng Lu | 2016-05-31 |
| 9305880 | Interconnects for semiconductor devices | Fu-Ming Huang, Han-Hsin Kuo, Chi-Ming Tsai | 2016-04-05 |
| 9272386 | Polishing head, and chemical-mechanical polishing system for polishing substrate | Shich-Chang Suen, Chin-Hsiang Chan, Yung-Cheng Lu | 2016-03-01 |
| 9269585 | Method for cleaning metal gate surface | Shich-Chang Suen, Li-Chieh Wu, Chi-Jen Liu, He Hui Peng, Yung-Chung Chen | 2016-02-23 |
| 9252060 | Reduction of OCD measurement noise by way of metal via slots | Chi-Ming Tsai, Han-Hsin Kuo, Fu-Ming Huang, Hao-Jen Liao, Ming-Chung Liang | 2016-02-02 |