Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449841 | Methods and systems for chemical mechanical polish and clean | Shich-Chang Suen, Chi-Jen Liu, Ying-Liang Chuang, Liang-Guang Chen, Ming-Liang Yen | 2016-09-20 |
| 9269585 | Method for cleaning metal gate surface | Shich-Chang Suen, Chi-Jen Liu, He Hui Peng, Liang-Guang Chen, Yung-Chung Chen | 2016-02-23 |