Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449841 | Methods and systems for chemical mechanical polish and clean | Chi-Jen Liu, Ying-Liang Chuang, Li-Chieh Wu, Liang-Guang Chen, Ming-Liang Yen | 2016-09-20 |
| 9352443 | Platen assembly, chemical-mechanical polisher, and method for polishing substrate | Chin-Hsiang Chan, Liang-Guang Chen, Yung-Cheng Lu | 2016-05-31 |
| 9272386 | Polishing head, and chemical-mechanical polishing system for polishing substrate | Chin-Hsiang Chan, Liang-Guang Chen, Yung-Cheng Lu | 2016-03-01 |
| 9269585 | Method for cleaning metal gate surface | Li-Chieh Wu, Chi-Jen Liu, He Hui Peng, Liang-Guang Chen, Yung-Chung Chen | 2016-02-23 |