Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478431 | BARC-assisted process for planar recessing or removing of variable-height layers | Wen-Kuei Liu, Teng-Chun Tsai, Kuo-Yin Lin, Shen-Nan Lee, Yu-Wei Chou +3 more | 2016-10-25 |
| 9385034 | Carbonization of metal caps | Hui-Lin Chang, Ting-Yu Shen | 2016-07-05 |
| 9352443 | Platen assembly, chemical-mechanical polisher, and method for polishing substrate | Shich-Chang Suen, Chin-Hsiang Chan, Liang-Guang Chen | 2016-05-31 |
| 9318447 | Semiconductor device and method of forming vertical structure | Chih-Tang Peng, Tai-Chun Huang, Teng-Chun Tsai, Cheng-Tung Lin, De-Fang Chen +4 more | 2016-04-19 |
| 9272386 | Polishing head, and chemical-mechanical polishing system for polishing substrate | Shich-Chang Suen, Chin-Hsiang Chan, Liang-Guang Chen | 2016-03-01 |
| 9236446 | Barc-assisted process for planar recessing or removing of variable-height layers | Wen-Kuei Liu, Teng-Chun Tsai, Kuo-Yin Lin, Shen-Nan Lee, Yu-Wei Chou +3 more | 2016-01-12 |