Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9496217 | Method and apparatus of forming a via | Hsin-Yi Tsai, Chih-Hao Chen, Chii-Ping Chen, Lai Chien Wen, Yuh-Jier Mii | 2016-11-15 |
| 9425049 | Cut first self-aligned litho-etch patterning | Kuan-Wei Huang, Chia-Ying Lee | 2016-08-23 |
| 9406511 | Self-aligned double patterning | Kuan-Wei Huang, Chia-Ying Lee | 2016-08-02 |
| 9368349 | Cut last self-aligned litho-etch patterning | Kuan-Wei Huang, Chia-Ying Lee | 2016-06-14 |
| 9305839 | Curing photo resist for improving etching selectivity | Wen-Kuo Hsieh, Tsung-Hung Chu | 2016-04-05 |
| 9252060 | Reduction of OCD measurement noise by way of metal via slots | Chi-Ming Tsai, Liang-Guang Chen, Han-Hsin Kuo, Fu-Ming Huang, Hao-Jen Liao | 2016-02-02 |