Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9522979 | Fluorine-containing silicon compound, method for producing same, and method for producing fluorine-containing silicon resin | Yoshinori Taneda, Tsutomu Ogihara, Seiichiro Tachibana | 2016-12-20 |
| 9490144 | Quaternary ammonium salt compound, composition for forming a resist under layer film, and patterning process | Tsutomu Ogihara | 2016-11-08 |
| 9460934 | Wet strip process for an antireflective coating layer | Martin Glodde, Wu-Song Huang, Javier Perez, Takeshi Kinsho, Tsutomu Ogihara +1 more | 2016-10-04 |
| 9372404 | Organic film composition, method for forming organic film and patterning process using this, and heat-decomposable polymer | Seiichiro Tachibana, Toshihiko Fujii, Kazumi Noda, Toshiharu Yano, Takeshi Kinsho | 2016-06-21 |
| 9284408 | Method for producing polyalkylene glycol derivative with narrow molecular weight distribution, and acetal group-containing alcohol compound for use therein and alkali metal salt thereof | Yuki Suka, Yuji Harada, Osamu Watanabe | 2016-03-15 |
| 9261788 | Compound for forming organic film, and organic film composition using the same, process for forming organic film, and patterning process | Seiichiro Tachibana, Daisuke KORI, Tsutomu Ogihara, Kazumi Noda, Toshiharu Yano | 2016-02-16 |