Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9372404 | Organic film composition, method for forming organic film and patterning process using this, and heat-decomposable polymer | Takeru Watanabe, Seiichiro Tachibana, Kazumi Noda, Toshiharu Yano, Takeshi Kinsho | 2016-06-21 |
| 9230827 | Method for forming a resist under layer film and patterning process | Shiori Nonaka, Seiichiro Tachibana, Daisuke KORI, Tsutomu Ogihara | 2016-01-05 |