Issued Patents 2016
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9511475 | Polishing device for removing polishing byproducts | Feng Chen | 2016-12-06 |
| 9508549 | Methods of forming electronic devices including filling porous features with a polymer | Jong Keun Park, Phillip D. Hustad, Emad Aqad, Cheng-Bai Xu, Peter Trefonas, III +1 more | 2016-11-29 |
| 9507259 | Photoresist composition | Emad Aqad, Cong Liu, Ching-Lung Chen, Shintaro Yamada, Cheng-Bai Xu +1 more | 2016-11-29 |
| 9442377 | Wet-strippable silicon-containing antireflectant | Owendi Ongayi, Charlotte Cutler, Shintaro Yamada, James F. Cameron | 2016-09-13 |
| 9436082 | Compositions comprising base-reactive component and processes for photolithography | Deyan Wang, Shintaro Yamada, Cong Liu, Joon Seok Oh, Chunyi Wu +2 more | 2016-09-06 |
| 9406527 | Semiconductor device manufacturing method and related semiconductor wafer | Jun Yang, Li Jiang, Pulei Zhu, Xiantao Li | 2016-08-02 |
| 9382444 | Neutral layer polymers, methods of manufacture thereof and articles comprising the same | Peter Trefonas, III, Phillip D. Hustad, Deyan Wang, Rahul Sharma, Jieqian Zhang | 2016-07-05 |
| 9348220 | Photoacid generators and photoresists comprising same | Emad Aqad, Cheng-Bai Xu, Cong Liu | 2016-05-24 |
| 9255079 | Photoacid generators and photoresists comprising same | Emad Aqad, Cong Liu, Joseph Mattia, Cheng-Bai Xu, George G. Barclay | 2016-02-09 |