Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9459533 | Polymer composition, photoresist comprising the polymer composition, and coated article comprising the photoresist | Matthew D. Christianson, Matthew M. Meyer | 2016-10-04 |
| 9442377 | Wet-strippable silicon-containing antireflectant | Charlotte Cutler, Mingqi Li, Shintaro Yamada, James F. Cameron | 2016-09-13 |
| 9323154 | Coating compositions for photolithography | Anthony Zampini, Michael K. Gallagher | 2016-04-26 |
| 9244352 | Coating compositions for use with an overcoated photoresist | Anthony Zampini, Gerald B. Wayton, Vipul Jain, Cong Liu, Suzanne M. Coley | 2016-01-26 |
| 9229319 | Photoacid-generating copolymer and associated photoresist composition, coated substrate, and method of forming an electronic device | Vipul Jain, James W. Thackeray, James F. Cameron | 2016-01-05 |