Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9341959 | Substrate holding device, exposure apparatus, and device manufacturing method | Makoto Shibuta, Yuichi Yoshida | 2016-05-17 |
| 9268237 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2016-02-23 |