Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9470984 | Exposure apparatus | — | 2016-10-18 |
| 9341959 | Substrate holding device, exposure apparatus, and device manufacturing method | Yuichi Yoshida, Hiroaki Takaiwa | 2016-05-17 |
| 9250537 | Immersion exposure apparatus and method with detection of liquid on members of the apparatus | — | 2016-02-02 |