Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9465287 | Methods of forming patterns for semiconductor device structures | Yuan He, Michael A. Many, Michael Hyatt | 2016-10-11 |
| 9330914 | Methods of forming line patterns in substrates | Vishal Sipani, Michael Hyatt | 2016-05-03 |
| 9235134 | Lens heating compensation in photolithography | Yuan He, Kaveri Jain, Lijing Gou, Zishu Zhang, Anton J. deVilliers +3 more | 2016-01-12 |