Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9465287 | Methods of forming patterns for semiconductor device structures | Scott L. Light, Yuan He, Michael A. Many | 2016-10-11 |
| 9358753 | Substrates and methods of forming a pattern on a substrate | Vishal Sipani, David A. Kewley, Kyle Armstrong, Michael Dean Van Patten | 2016-06-07 |
| 9330914 | Methods of forming line patterns in substrates | Scott L. Light, Vishal Sipani | 2016-05-03 |
| 9235134 | Lens heating compensation in photolithography | Yuan He, Kaveri Jain, Lijing Gou, Zishu Zhang, Anton J. deVilliers +3 more | 2016-01-12 |