Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418848 | Methods of forming patterns with a mask formed utilizing a brush layer | William R. Brown, Adam L. Olson, Ho Seop Eom, Xue Gloria Chen, Nik Mirin +5 more | 2016-08-16 |
| 9396996 | Methods of forming openings in semiconductor structures | Adam L. Olson, Lijing Gou, William R. Brown, Ho Seop Eom, Xue Chen +1 more | 2016-07-19 |
| 9291907 | Methods for forming resist features and arrays of aligned, elongate resist features | Adam L. Olson, William R. Brown, Lijing Gou, Ho Seop Eom, Anton J. deVilliers | 2016-03-22 |
| 9235134 | Lens heating compensation in photolithography | Yuan He, Lijing Gou, Zishu Zhang, Anton J. deVilliers, Michael Hyatt +3 more | 2016-01-12 |