Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9235134 | Lens heating compensation in photolithography | Yuan He, Kaveri Jain, Lijing Gou, Anton J. deVilliers, Michael Hyatt +3 more | 2016-01-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9235134 | Lens heating compensation in photolithography | Yuan He, Kaveri Jain, Lijing Gou, Anton J. deVilliers, Michael Hyatt +3 more | 2016-01-12 |