Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507629 | Network architecture and protocol for cluster of lithography machines | Marcel Nicolaas Jacobus van Kervinck | 2016-11-29 |
| 9457549 | Method for forming an optical fiber array | Ralph Van Melle, Teunis Van De Peut, Henk Derks, Frederik Matthias Spiegelhalder, Roy Josephus Stephanus Derks +1 more | 2016-10-04 |
| 9395635 | Position determination in a lithography system using a substrate having a partially reflective position mark | Niels Vergeer | 2016-07-19 |
| 9395636 | Lithography system for processing a target, such as a wafer, and a method for operating a lithography system for processing a target, such as a wafer | Niels Vergeer, Godefridus Cornelius Antonius Couweleers, Laurens Plandsoen, Cor Verburg | 2016-07-19 |
| 9383662 | Lithography system for processing at least a part of a target | Niels Vergeer, Godefridus Cornelius Antonius Couweleers, Laurens Plandsoen, Cor Verburg | 2016-07-05 |
| 9362084 | Electro-optical element for multiple beam alignment | Alrik van den Brom, Stijn Willem Herman Karel Steenbrink, Marco Jan-Jaco Wieland, Pieter Kappelhof | 2016-06-07 |
| 9261800 | Alignment of an interferometer module for use in an exposure tool | Thomas Adriaan Ooms, Niels Vergeer, Godefridus Cornelius Antonius Couweleers | 2016-02-16 |