Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9395636 | Lithography system for processing a target, such as a wafer, and a method for operating a lithography system for processing a target, such as a wafer | Guido De Boer, Niels Vergeer, Godefridus Cornelius Antonius Couweleers, Cor Verburg | 2016-07-19 |
| 9383662 | Lithography system for processing at least a part of a target | Niels Vergeer, Guido De Boer, Godefridus Cornelius Antonius Couweleers, Cor Verburg | 2016-07-05 |