Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9395636 | Lithography system for processing a target, such as a wafer, and a method for operating a lithography system for processing a target, such as a wafer | Guido De Boer, Niels Vergeer, Laurens Plandsoen, Cor Verburg | 2016-07-19 |
| 9383662 | Lithography system for processing at least a part of a target | Niels Vergeer, Guido De Boer, Laurens Plandsoen, Cor Verburg | 2016-07-05 |
| 9261800 | Alignment of an interferometer module for use in an exposure tool | Guido De Boer, Thomas Adriaan Ooms, Niels Vergeer | 2016-02-16 |