Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460260 | Enhanced stitching by overlap dose and feature reduction | — | 2016-10-04 |
| 9460954 | Method of clamping a substrate and clamp preparation unit using capillary clamping force | Hendrik Jan De Jong | 2016-10-04 |
| 9362084 | Electro-optical element for multiple beam alignment | Alrik van den Brom, Stijn Willem Herman Karel Steenbrink, Guido De Boer, Pieter Kappelhof | 2016-06-07 |
| 9355751 | Multi-electrode stack arrangement | Willem Henk Urbanus | 2016-05-31 |
| 9305747 | Data path for lithography apparatus | Teunis Van De Peut, Floris Pepijn van der Wilt, Ernst Habekotte | 2016-04-05 |