Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9483819 | Contour-based array inspection of patterned defects | Chien-Huei Chen, Ajay Gupta, Thanh Huy Ha, Jianwei Wang, Hedong Yang +1 more | 2016-11-01 |
| 9318395 | Systems and methods for preparation of samples for sub-surface defect review | Cecelia Campochiaro, Hong Xiao, Benjamin James Thomas Clarke, Harsh Sinha | 2016-04-19 |
| 9310316 | Selecting parameters for defect detection methods | Kenong Wu, Chris W. Lee, Yi-Chang Liu | 2016-04-12 |