Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449788 | Enhanced defect detection in electron beam inspection and review | Gary Fan, Kumar Raja Guvindan Raju, Wade Lenn Jensen, Lorraine Ellen Young | 2016-09-20 |
| 9318395 | Systems and methods for preparation of samples for sub-surface defect review | Cecelia Campochiaro, Michael J. Van Riet, Benjamin James Thomas Clarke, Harsh Sinha | 2016-04-19 |
| 9282293 | Method and system for measuring critical dimension and monitoring fabrication uniformity | Wei Fang, Jack Jau | 2016-03-08 |
| 9257260 | Method and system for adaptively scanning a sample during electron beam inspection | Gary Fan, David Chen, Vivekanand Kini | 2016-02-09 |