Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494856 | Method and system for fast inspecting defects | Wei Fang | 2016-11-15 |
| 9436988 | Method and system of classifying defects on a wafer | Wei Fang, Zhaoli Zhang | 2016-09-06 |
| 9400176 | Dynamic focus adjustment with optical height detection apparatus in electron beam system | Joe Wang, Van-Duc Nguyen, Yi Wang, Zhong-Wei Chen | 2016-07-26 |
| 9362087 | Charged particle beam apparatus | Zhongwei Chen, Weiming Ren | 2016-06-07 |
| 9282293 | Method and system for measuring critical dimension and monitoring fabrication uniformity | Wei Fang, Hong Xiao | 2016-03-08 |