Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523646 | Wafer and reticle inspection systems and methods for selecting illumination pupil configurations | Grace Hsiu-Ling Chen, Rudolf Brunner, Lisheng Gao, Robert M. Danen | 2016-12-20 |
| 9347891 | Wafer and reticle inspection systems and methods for selecting illumination pupil configurations | Grace Hsiu-Ling Chen, Rudolf Brunner, Lisheng Gao, Robert M. Danen | 2016-05-24 |