Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523646 | Wafer and reticle inspection systems and methods for selecting illumination pupil configurations | Rudolf Brunner, Lisheng Gao, Robert M. Danen, Lu Chen | 2016-12-20 |
| 9442077 | Scratch filter for wafer inspection | Junqing Huang, Huan Jin, Lisheng Gao | 2016-09-13 |
| 9422517 | Microscale and nanoscale structures for manipulating particles | Fabio Fachin, Mehmet Toner, Brian L. Wardle | 2016-08-23 |
| 9389166 | Enhanced high-speed logarithmic photo-detector for spot scanning system | Ralph C. Wolf, Kai Cao, Jamie M. Sullivan, Paul Donders, Derek Mackay | 2016-07-12 |
| 9347891 | Wafer and reticle inspection systems and methods for selecting illumination pupil configurations | Rudolf Brunner, Lisheng Gao, Robert M. Danen, Lu Chen | 2016-05-24 |
| 9239295 | Variable polarization wafer inspection | Xianzhao Peng, Mark Wang | 2016-01-19 |