Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523646 | Wafer and reticle inspection systems and methods for selecting illumination pupil configurations | Grace Hsiu-Ling Chen, Rudolf Brunner, Robert M. Danen, Lu Chen | 2016-12-20 |
| 9442077 | Scratch filter for wafer inspection | Junqing Huang, Huan Jin, Grace Hsiu-Ling Chen | 2016-09-13 |
| 9347891 | Wafer and reticle inspection systems and methods for selecting illumination pupil configurations | Grace Hsiu-Ling Chen, Rudolf Brunner, Robert M. Danen, Lu Chen | 2016-05-24 |
| 9310320 | Based sampling and binning for yield critical defects | Satya Kurada, Raghav Babulnath, Kwok Ng | 2016-04-12 |