Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9423357 | Oblique illuminator for inspecting manufactured substrates | Shiyu Zhang, Charles N. Wang, Yevgeniy Churin, Yong-Mo Moon, Hyoseok Daniel Yang | 2016-08-23 |
| 9395340 | Interleaved acousto-optical device scanning for suppression of optical crosstalk | Jamie M. Sullivan, Wenjian Cai, Yevgeniy Churin, Ralph Johnson, Meier Brender +2 more | 2016-07-19 |
| 9239295 | Variable polarization wafer inspection | Xianzhao Peng, Grace Hsiu-Ling Chen | 2016-01-19 |