Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9435030 | Radical reactor with inverted orientation | Daniel H. Lee, Samuel S. Pak, Sang In Lee | 2016-09-06 |
| 9423357 | Oblique illuminator for inspecting manufactured substrates | Shiyu Zhang, Charles N. Wang, Yevgeniy Churin, Yong-Mo Moon, Mark Wang | 2016-08-23 |