Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9515156 | Air gap spacer integration for improved fin device performance | Paul R. Besser, Bart J. van Schravendijk, Gerardo Delgadino, Harald Orkorn-Schmidt, Dengliang Yang | 2016-12-06 |
| 9230819 | Internal plasma grid applications for semiconductor fabrication in context of ion-ion plasma processing | Alex Paterson, Do-Young Kim, Gowri Kamarthy, Helene Del Puppo, Jen-Kan Yu +5 more | 2016-01-05 |