Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9340866 | Substrate support with radio frequency (RF) return path | Alan A. Ritchie, Donny Young, Wei Wang, Ananthkrishna Jupudi, Kirankumar Neelasandra SAVANDAIAH | 2016-05-17 |
| 9281167 | Variable radius dual magnetron | Rongjun Wang, Muhammad M. Rasheed, Xianmin Tang | 2016-03-08 |