SR

Sivakami Ramanathan

Lam Research: 2 patents #54 of 356Top 20%
Overall (2016): #98,083 of 481,213Top 25%
2
Patents 2016

Issued Patents 2016

Patent #TitleCo-InventorsDate
9387521 Method of wet cleaning aluminum chamber parts Hong Shih, Fan-Cheung Sze, Brian McMillin, John Daugherty, Yan Fang +2 more 2016-07-12
9337002 Corrosion resistant aluminum coating on plasma chamber components John Daugherty, Hong Shih, Lin Xu, Anthony Amadio, Robert Griffith O'Neill +5 more 2016-05-10