Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523646 | Wafer and reticle inspection systems and methods for selecting illumination pupil configurations | Grace Hsiu-Ling Chen, Rudolf Brunner, Lisheng Gao, Lu Chen | 2016-12-20 |
| 9389349 | System and method to determine depth for optical wafer inspection | Pavel Kolchin, Mikhail Haurylau | 2016-07-12 |
| 9347891 | Wafer and reticle inspection systems and methods for selecting illumination pupil configurations | Grace Hsiu-Ling Chen, Rudolf Brunner, Lisheng Gao, Lu Chen | 2016-05-24 |