Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D770990 | Elastic membrane for semiconductor wafer polishing apparatus | Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Shingo Togashi, Satoru Yamaki | 2016-11-08 |
| D769200 | Elastic membrane for semiconductor wafer polishing apparatus | Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Shingo Togashi, Satoru Yamaki | 2016-10-18 |
| D766849 | Substrate retaining ring | Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Shingo Togashi, Satoru Yamaki | 2016-09-20 |
| 9403255 | Polishing apparatus and polishing method | Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Shingo Togashi, Satoru Yamaki | 2016-08-02 |
| 9358662 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2016-06-07 |