Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D770990 | Elastic membrane for semiconductor wafer polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2016-11-08 |
| D769200 | Elastic membrane for semiconductor wafer polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2016-10-18 |
| D766849 | Substrate retaining ring | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2016-09-20 |
| 9403255 | Polishing apparatus and polishing method | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2016-08-02 |
| 9399277 | Polishing apparatus and polishing method | Hiroshi Yoshida, Hozumi Yasuda | 2016-07-26 |
| 9308621 | Method and apparatus for polishing a substrate | Tetsuji Togawa, Shingo Saito, Tomoshi Inoue | 2016-04-12 |