Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9457447 | Polishing apparatus and polishing method | Masaya Seki, Masayuki Nakanishi | 2016-10-04 |
| 9457448 | Polishing apparatus and polishing method | Masaya Seki, Masayuki Nakanishi | 2016-10-04 |
| 9399274 | Wafer polishing method | Atsushi Yoshida, Toshifumi Watanabe | 2016-07-26 |
| 9308621 | Method and apparatus for polishing a substrate | Makoto Fukushima, Shingo Saito, Tomoshi Inoue | 2016-04-12 |
| 9248543 | Method of detecting abnormality in polishing of a substrate and polishing apparatus | Masaya Seki, Hiroyuki Takenaka | 2016-02-02 |
| 9248545 | Substrate processing apparatus and substrate processing method | Masaya Seki, Masayuki Nakanishi, Kenya Ito | 2016-02-02 |