Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9517544 | Polishing apparatus and polishing method | Tamami Takahashi, Hiroaki Kusa, Kenji Yamaguchi, Masayuki Nakanishi | 2016-12-13 |
| 9457447 | Polishing apparatus and polishing method | Tetsuji Togawa, Masayuki Nakanishi | 2016-10-04 |
| 9457448 | Polishing apparatus and polishing method | Tetsuji Togawa, Masayuki Nakanishi | 2016-10-04 |
| 9287158 | Substrate processing apparatus | Tamami Takahashi, Mitsuhiko Shirakashi, Kenya Ito, Kazuyuki Inoue, Kenji Yamaguchi | 2016-03-15 |
| 9248543 | Method of detecting abnormality in polishing of a substrate and polishing apparatus | Tetsuji Togawa, Hiroyuki Takenaka | 2016-02-02 |
| 9248545 | Substrate processing apparatus and substrate processing method | Tetsuji Togawa, Masayuki Nakanishi, Kenya Ito | 2016-02-02 |