Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9287158 | Substrate processing apparatus | Tamami Takahashi, Mitsuhiko Shirakashi, Kenya Ito, Kenji Yamaguchi, Masaya Seki | 2016-03-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9287158 | Substrate processing apparatus | Tamami Takahashi, Mitsuhiko Shirakashi, Kenya Ito, Kenji Yamaguchi, Masaya Seki | 2016-03-15 |