Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9517544 | Polishing apparatus and polishing method | Masaya Seki, Hiroaki Kusa, Kenji Yamaguchi, Masayuki Nakanishi | 2016-12-13 |
| D752507 | Energy exchange chamber | Akira Goto | 2016-03-29 |
| 9287158 | Substrate processing apparatus | Mitsuhiko Shirakashi, Kenya Ito, Kazuyuki Inoue, Kenji Yamaguchi, Masaya Seki | 2016-03-15 |