Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9517544 | Polishing apparatus and polishing method | Tamami Takahashi, Masaya Seki, Hiroaki Kusa, Kenji Yamaguchi | 2016-12-13 |
| 9492910 | Polishing method | Yu Ishii, Hiroyuki Kawasaki, Kenya Ito, Kenji Kodera, Michiyoshi YAMASHITA | 2016-11-15 |
| 9457447 | Polishing apparatus and polishing method | Masaya Seki, Tetsuji Togawa | 2016-10-04 |
| 9457448 | Polishing apparatus and polishing method | Masaya Seki, Tetsuji Togawa | 2016-10-04 |
| 9393595 | Abrasive film fabrication method and abrasive film | Yu Ishii, Hiroyuki Kawasaki, Kenya Ito | 2016-07-19 |
| 9248545 | Substrate processing apparatus and substrate processing method | Masaya Seki, Tetsuji Togawa, Kenya Ito | 2016-02-02 |