Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D770990 | Elastic membrane for semiconductor wafer polishing apparatus | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2016-11-08 |
| D769200 | Elastic membrane for semiconductor wafer polishing apparatus | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2016-10-18 |
| D766849 | Substrate retaining ring | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2016-09-20 |
| 9403255 | Polishing apparatus and polishing method | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2016-08-02 |
| 9399277 | Polishing apparatus and polishing method | Hiroshi Yoshida, Makoto Fukushima | 2016-07-26 |