Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431268 | Isotropic atomic layer etch for silicon and germanium oxides | Thorsten Lill, Ivan L. Berry, III, Alan M. Schoepp, David Hemker | 2016-08-30 |
| 9391267 | Method to etch non-volatile metal materials | Harmeet Singh, Samantha Tan, Jeffrey Marks, Thorsten Lill, Richard Janek +2 more | 2016-07-12 |
| 9257638 | Method to etch non-volatile metal materials | Samantha Tan, Wenbing Yang, Richard Janek, Jeffrey Marks, Harmeet Singh +1 more | 2016-02-09 |