Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514954 | Peroxide-vapor treatment for enhancing photoresist-strip performance and modifying organic films | Bayu Thedjoisworo, Bradley Jon Jacobs, David Cheung | 2016-12-06 |
| 9431268 | Isotropic atomic layer etch for silicon and germanium oxides | Thorsten Lill, Meihua Shen, Alan M. Schoepp, David Hemker | 2016-08-30 |
| 9425041 | Isotropic atomic layer etch for silicon oxides using no activation | Pilyeon Park, Faisal Yaqoob | 2016-08-23 |
| 9406535 | Ion injector and lens system for ion beam milling | Thorsten Lill | 2016-08-02 |