DH

David Hemker

Lam Research: 1 patents #108 of 356Top 35%
Overall (2016): #427,057 of 481,213Top 90%
1
Patents 2016

Issued Patents 2016

Patent #TitleCo-InventorsDate
9431268 Isotropic atomic layer etch for silicon and germanium oxides Thorsten Lill, Ivan L. Berry, III, Meihua Shen, Alan M. Schoepp 2016-08-30