Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431268 | Isotropic atomic layer etch for silicon and germanium oxides | Thorsten Lill, Ivan L. Berry, III, Meihua Shen, Alan M. Schoepp | 2016-08-30 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431268 | Isotropic atomic layer etch for silicon and germanium oxides | Thorsten Lill, Ivan L. Berry, III, Meihua Shen, Alan M. Schoepp | 2016-08-30 |