Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514954 | Peroxide-vapor treatment for enhancing photoresist-strip performance and modifying organic films | Bayu Thedjoisworo, Bradley Jon Jacobs, Ivan L. Berry, III | 2016-12-06 |
| 9397011 | Systems and methods for reducing copper contamination due to substrate processing chambers with components made of alloys including copper | Haoquan Fang, Yuk-Hong Ting | 2016-07-19 |