Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472372 | Charged particle beam writing apparatus and charged particle beam writing method | Taku Yamada, Kaoru Tsuruta, Yasuyuki Taneda | 2016-10-18 |
| 9466461 | Rotation angle measuring method of multi-charged particle beam image, rotation angle adjustment method of multi-charged particle beam image, and multi-charged particle beam writing apparatus | Osamu Iizuka | 2016-10-11 |