Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472372 | Charged particle beam writing apparatus and charged particle beam writing method | Taku Yamada, Yasuyuki Taneda, Kenji Ohtoshi | 2016-10-18 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472372 | Charged particle beam writing apparatus and charged particle beam writing method | Taku Yamada, Yasuyuki Taneda, Kenji Ohtoshi | 2016-10-18 |