Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472372 | Charged particle beam writing apparatus and charged particle beam writing method | Taku Yamada, Kaoru Tsuruta, Kenji Ohtoshi | 2016-10-18 |
| 9401261 | Ozone supplying apparatus, ozone supplying method, and charged particle beam drawing system | Yoshiro Yamanaka | 2016-07-26 |